| 摘要 |
An MxN actuated mirror array for use in an optical projection system, comprises: a substrate having an array of MxN openings therethrough and an array of connecting terminals, wherein each of the MxN openings is filled with a metallization and each of the connecting terminals is located on top of each of the MxN openings filled with the metallization; an array of MxN actuators, wherein each of the MxN actuators is provided with a top surface, a bottom surface and a pair of external sides, and is comprised of a pair of electrodisplacive members, a common signal electrode located between the pair of electrodisplacive members, and a pair of reference electrodes on the pair of external sides of the actuator, respectively; and an array of MxN mirrors, wherein each of the MxN mirrors is coupled with each of the MxN actuators and is located on the top surface thereof.
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