SPUTTERING TARGET FOR FORMING OPTICAL-RECORDING PROTECTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target for forming an optical-recording protective film used in the optical media such as an optical disk recording and erasing the information with a light beam and consisting of a zinc sulfide-silicon dioxide sintered compact to form a protective film in uniform thickness. SOLUTION: This sputtering target consists of a sintered compact contg. 10-30mol% >=99.999wt.% purity silicon dioxide and the balance >=99.999wt.% purity zinc sulfide and having >=90% relative density. In this case, theα-crystal zinc sulfide and theβ-crystal zinc sulfide are limited to conform to 0.3<=α/β<=0.95.