| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser device, where a discharge electrodes have long service life and ultraviolet rays generated by discharge can be set high in utilization factor. SOLUTION: Dielectric bodies 15 are disposed adjacent to the discharge electrode 8b out of a pair of primary discharge electrodes 8a and 8b, extending in the lengthwise direction of the electrode 8b, and two or more pairs of discharge electrodes 6a and 6b are mounted on the opposite surfaces of the dielectric bodies 15 in the lengthwise direction of the dielectric body respectively. Ultraviolet rays, generated by a discharge which occurs along the surface of the dielectric body 15 between the discharge electrodes 8a and 8b, are made to irradiate laser gas between the primary discharge electrodes 8a and 8b to pre-ionize the laser gas. By doing so, most of the ultraviolet rays generated by discharge can be used for pre-ionizing the laser gas, and by creeping discharge, discharge electrodes can be less sputtered with metal particles. |
