RASTER MICROSCOPE ACTUATOR

摘要

FIELD: analysis of physical properties of materials; keying operating elements of raster microscopes. SUBSTANCE: actuator has solid piezoceramic rod of cross-shaped section provided with transverse slots. Planes of symmetry of some slots are aligned with those of rod and planes of symmetry of other slots are displaced relative to those of rod through quarter the width of rod sectional area. Control electrodes are applied to side surfaces of rod and to inner side surfaces of the latter formed by slots on side of first face. Actuator is suited for use in miscellaneous devices for scientific analyses and in nanoengineering systems. EFFECT: enlarged functional capabilities due to comprehensive range of operating temperatures and high sensitivity of device. 2 dwg