STAGE EQUIPMENT AND PROJECTION OPTICS EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To improve measurement accuracy in various types of measurement wherein a stage shifts. SOLUTION: When a sample base 20 shifts integrally with a stage 18, the coordinate position of the sample base 20 is measured by a measuring means 26. A storing means 36 stores positional fluctuation of the sample base 20 in the Z axis direction generated by shift of the stage 18, corresponding to the coordinate position of the sample base 20. Therefore, in the case of, for example, measuring flatness of a sample W on the sample base 20, while shifting the stage 18, the positional fluctuationin the Z axis direction corresponding to the coordinate position is read out from a storing means 36, by shifted position of the sample base 20, namely, by measuring point. The fluctuation is used as correction value, the position of the sample base 20 in the Z axis direction can be corrected, and flatness is measured under the corrected condition.