发明名称 THIN FILM DISPLAY ELEMENT AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To prevent the generation of crack in an insulating thin film, and while to eliminate the separating process at the time of wasting by forming all of a conductive layer, an insulating thin film and a conductive thin film of carbon atom. SOLUTION: A top surface of a conductive layer 1, which is formed of carbon having the graphite structure, is formed with an insulating thin film 2, which is formed of carbon having the diamond structure. A top surface of this insulating film 2 is formed with the pseudo one-dimensional structure. This thin film display element is housed in a vacuum container. Thickness of the insulating thin film 2 is set at 2-3nm, and thickness of the conductive thin film 3 is set at several tens to several hundred of nm. Direct current voltage at about 10V is applied between the conductive layer 1 and the conductive thin film 3 so that the electron, which is excited from the insulating thin film 2, is passed through a conductive thin film 3 by the tunneling effect and that a fluorescent plate of an upper part is irradiated with the electron. Since the insulating thin film 2 has the diamond structure and strong, even in the case where the insulating thin film 2 is formed thin, generation of crack can be prevented.</p>
申请公布号 JPH10208619(A) 申请公布日期 1998.08.07
申请号 JP19970009065 申请日期 1997.01.22
申请人 FUJI ELECTRIC CO LTD 发明人 IDENO YUTAKA;SUGIYAMA SHUICHI
分类号 H01J9/02;G09F9/30;H01J1/30;H01J1/312;H01J29/04;H01J31/12;H01L49/02;(IPC1-7):H01J1/30 主分类号 H01J9/02
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