ION CHROMATOGRAPHY SYSTEM FOR ENVIRONMENTAL ANALYSIS WITHIN SEMICONDUCTOR EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To enable quickly handling of any condition during an analysis by immediately analyzing atmospheric components at a measuring position. SOLUTION: There are arranged an air forcing type impinging device and an ion chromatography. The impinging device is provided with an absorbing liquid container 39, a suction pipe 32 and an exhaust pipe 35 by which outside is linked to the container 39 and a pump 37 for forcing atmospheric air and the ion chromatography is provided with a guard column 16, a separation column 17 and a detector 18. In this ion chromatography system, a intake port of the suction pipe 32 is positioned at a measuring target and the impinging device is linked to the ion chromatography so that an absorbing solution of the absorbing liquid container 39 directly enters a sample injection port of the ion chromatography.