发明名称 |
Laser plasma X-ray source, and semiconductor lithography apparatus and method using the same |
摘要 |
<p>A laser plasma X-ray source which has an improved X-ray conversion efficiency and minimized occurrence of debris is provided, and a semiconductor lithography apparatus using the same and a method therefor are provided. Its X-ray generation unit 100 is comprised of: vacuum chamber 5 which encases the target; target supply unit 110 which supplies a fine particle mixture gas target into vacuum chamber 5; laser irradiation unit 120 which irradiates laser beam 2 on the particle mixture gas target 10; and target recovery unit 130 which recovers unused particle mixture gas target from the vacuum chamber 5. <IMAGE></p> |
申请公布号 |
EP0858249(A1) |
申请公布日期 |
1998.08.12 |
申请号 |
EP19980101013 |
申请日期 |
1998.01.21 |
申请人 |
HITACHI, LTD. |
发明人 |
MATSUI, TETSUYA;YAMADA, KIMIO;NISHI, MASATSUGU;UENO, MANABU;TOOMA, MASAHIRO |
分类号 |
G21K5/02;G03F7/20;H01J35/00;H01L21/027;H05G2/00;H05H1/24;(IPC1-7):H05G2/00 |
主分类号 |
G21K5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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