| 摘要 |
PROBLEM TO BE SOLVED: To facilitate carrying of a bucket containing wafers in a stacked state in a water basin and rotation and movement of the bucket in the water basin and to prevent flying out of a wafer from the bucket during the rotation o the bucket. SOLUTION: A support frame 45 is rotatably and movably disposed in water basin 21. In a state that a number of wafers 22 are contained in a stacked state in a bucket 23 the bucket 23 is carried on a support frame 45 in the water basin 21 so that the stacking direction of the wafers 22 is extended sideways. With this state, the wafers 22 are held in a contained state in the bucket 23 by a holding mechanism 66 on the support frame 45. Thereafter, through the rotation of the support frame 45, the bucket 23 is rotated, and the attitude of the wafers 22 is varied such that the stacking direction thereof is longitudinally extended. Further, through the movement of the support frame 45, the bucket 23 is laterally moved and the wafers 22 are arranged in a separation position in the water basin 21. |
