TIN OXIDE POWDER FOR HIGH DENSITY SINTERED COMPACT

摘要

PROBLEM TO BE SOLVED: To obtain stock powder giving a high density sintered compact for a target material used for producing an ITO film by incorporating a specified amt. of tin oxide powder having a specified BET specific surface area and a specified crystal diameter of primary particles and a specified particle diameter of secondary particles. SOLUTION: This tin oxide powder contains >=50% powder having 2-10m<2> /g, preferably 3-8m<2> /g BET specific surface area and >=800Åcrystal diameter of primary particles and 5-30μm particle diameter of secondary particles. This tin oxide powder is obtd. by electrolyzing metal tin as the anode at constant voltage, recovering the resultant precipitate of tin hydroxide, drying and sintering it. The powder may be separated from tin oxide powder obtd. by a neutralization-precipitation method. When the powder is mixed with specified indium powder and subjected to hot press forming, a high density ITO sintered compact whose density is >=98% of the theoretical density is obtd.