发明名称 DRIVER AND SUBSTRATE TREATMENT DEVICE USING THE DRIVER
摘要 PROBLEM TO BE SOLVED: To quickly avoid failures such as the breakage of a conveyed object, etc. SOLUTION: In a motor driver 15 which drives a servomotor 14 based on a control signal supplied from a control unit 16, an emergency processing is performed by the control of an emergency processing circuit 158 when the respective absolute values of a differential torqueΔτbetween a set torqueτ0(t) based on a command signal from a command circuit 151 and an actual torqueτ1, a differential pulse numberΔP between a command pulse number PA based on a command signal and an outputted pulse number PM and a differential angular velocityΔωbetween a command angular velocityωA based on a command signal and an outputted angular velocityωM exceed specified torque threshold, pulse deviation threshold and angular velocity threshold. Since the command for the emergency processing is performed according to the monitoring of the motor driver 5, the quick emergency processing can be performed, so that safety can be improved.
申请公布号 JPH10257668(A) 申请公布日期 1998.09.25
申请号 JP19970060976 申请日期 1997.03.14
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KITAZAWA HIROYUKI
分类号 H01L21/677;H01L21/68;H02H7/085;H02P7/00;H02P29/02;(IPC1-7):H02H7/085 主分类号 H01L21/677
代理机构 代理人
主权项
地址