| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacture of the rectangular substrate for display element formation that can carry out surface processing for the rectangular substrate uniformly. SOLUTION: After rectangular substrates for display element formation which are stored in a cassette are taken out of a loader and an unloader part 1 one by one, preprocessing including etching or resist removal is performed according to a pattern formed on a square substrate P carried in a vertical state, and then a washing process and a drying process are carried out. The rectangular substrate P is sucked and held vertically. |
