| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier, where a board during carriage is not polluted by the disturbance of an air current caused due to its own shifting, and a substrate treating apparatus. SOLUTION: A cover member 30 is attached to a carriage unit arranged in the carriage region of a substrate treating apparatus. The cover member 30 has a hollow cylindrical case body 31 which surrounds at least arms 29a and 29b, and an air conditioning unit including a fan 32 and a filter 33 is arranged at its top. The inside of the cover member 30 is supplied with a descending current of clean air by the fan 32 and the filter 33, and the substrate retained by the arms 29a and 29b is carried, being held in a clean atmosphere. The occurrence of a turbulence at shifting of the carry unit is suppressed by the cylindrical case body 31, and the pollution of a board by the fling up of particles is prevented. |
