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发明名称
摘要
申请公布号
JP2814106(B2)
申请公布日期
1998.10.22
申请号
JP19890163167
申请日期
1989.06.26
申请人
发明人
分类号
C23C16/30;(IPC1-7):C23C16/30
主分类号
C23C16/30
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代理人
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地址
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