Probe card array check plate with transition zones

摘要

A probe card array check plate is provided with transition zones to prevent a semi-conductor probe from impacting an epoxy joint in the check plate during an over travel test. The transition zone is in the form of beveled edges or tapers between first and second testing surfaces. In alternate embodiments, two or more different types of testing surfaces are juxta positioned, or an optical measurement window is made sufficiently large to prevent an over traveling probe tip from entering an epoxied area.