METHOD FOR TRANSFERRING CONDUCTIVE BALL

摘要

PROBLEM TO BE SOLVED: To provide the transfer method of conductive balls, which eliminates the pickup error and the transfer error of the conductive balls and can securely transfer the balls on the electrode of a work. SOLUTION: Since the vibrators 29 are operated while a frequency is changed within a previously set frequency range when the vibrators 29 are mounted on a chuck tool 26 to vacuum-chuck the conductive balls 1 and/or when the vacuum chuck of the conductive balls is released to transfer them, resonance with the vibration frequencies of the vibrators 29 can be caused in the respective parts of the lower faces of the chuck tool 26 at any time in a process for changing the frequency. The conductive balls 1a which are excessively adhered to the lower face of the chuck tool 26 can securely be eliminated and the pickup error and the transfer error can be eliminated with the vibration of large amplitude by means of resonance.