发明名称 ELECTRICAL HEATING ELEMENT PACKAGING COOLING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electrical heating element packaging cooling device with an improved cooling efficiency. SOLUTION: A device has a circulation accommodation part 25 for circulating a cooling liquid 7 that is constituted by covering a substrate 1 with a cooling liquid sealing case 2, and at the same, by surrounding and accommodating an electrical heating element 3 that is arranged in a matrix, thus circulating a cooling liquid 7 at the circulation accommodation part 25. In this case, partitions 8 for separating each two electrical heating elements 3 in a row direction are provided, and zigzag plates 9 that are formed alternately for side walls 22 and 23 and the partitions 8 that oppose each other or the partitions 8 that oppose each other are provided at every other electrical heating element 3 being arranged in a column direction, thus forming a zigzag circulation path at the circulation accommodation part 25.
申请公布号 JPH10303586(A) 申请公布日期 1998.11.13
申请号 JP19970109155 申请日期 1997.04.25
申请人 ADVANTEST CORP 发明人 SUGA KAZUNARI
分类号 H05K7/20;H01L23/44;H01L23/473;(IPC1-7):H05K7/20 主分类号 H05K7/20
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