| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a stage or work such as a wafer and a reticle being mounted on the stage from being deformed by winding a coil over an entire stroke, so that movable magnets moving in a stator oppose each other at the upper and lower yokes of the stator being arranged over the entire length of the stroke. SOLUTION: A guide 2 is fixed on a stage base 1 and a movable part 3 is supported on the guide 2 in scanning direction via a lubrication means. A movable magnet being retained by a retaining frame 4 is fixed at both sides of the movable part 3 of a stage. Upper and lower yokes 6 and 7 over the entire stroke are provided as a stator that is opposite to the movable magnet, a spacer 8 for cutting a magnetic path is provided between the yokes 6 and 7, and single-phase coils 9a and 9b are uniformly wound around the yokes 6 and 7. As a result, the movable magnet moving in the stator and a distance that is opposite to the upper and lower yokes 6 and 7 become equal, and attractive forces where the movable magnet receive from the upper and lower yokes 6 and 7 are canceled each other, thus preventing the stage from being deformed.</p> |
