发明名称 |
INTEGRATED MAGNETIC LEVITATION AND ROTATION SYSTEM. |
摘要 |
A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber, for semiconductor wafer processing. The stator assembly (16) has a permanent magnet (38) or magnets sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly levitates and passively centers the rotor along a vertical axis and against tilt about the either horizontal axis (26, 28), provides a radial position bias for the rotor, and establishes a motor flux field at the rotor poles. Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor. The control coils (42) provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering. |
申请公布号 |
MX9803156(A) |
申请公布日期 |
1998.11.29 |
申请号 |
MX19980003156 |
申请日期 |
1998.04.22 |
申请人 |
SATCON TECHNOLOGY CORPORATION |
发明人 |
STEPHEN B. NICHOLS;SHANKAR JAGANNATHAN;KEVIN LEARY;DAVID EISENHAURE;WILLIAM STANTON;RICHARD HOCKNEY;JAMES DOWNER;VIJAY GONDHALEKAR |
分类号 |
H02K17/08;F16C39/06;H01L21/687;H02K7/09;H02K17/12;H02K17/30;H02K19/10;H02K21/38 |
主分类号 |
H02K17/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|