发明名称 X-RAY TOPOGRAPHIC APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide an X-ray topographic apparatus in which the loading and unloading operation of a large-diameter sample with reference to a scanning device can be performed easily when a topographic photographing operation is performed regarding the sample. SOLUTION: A sample frame 3 which is provided with an in-plane rotation member 12 is arranged and installed on an X-ray optical axis L. A sample S is supported so as to be sandwiched by one pair of high-tension films 22 which are installed inside a sample holder 14. The sample holder 14 is inserted between guide members 13a, 13b from the transverse direction with reference to the X-ray optical axis L so as to be placed on the in-plane rotation member 12. Since it is not required at all to retreat and move slit members and other X-ray optical elements which are arranged and installed before and after the sample frame 3 when the sample S is loaded and unloaded, the loading and unloading operation of the sample S can be performed very simply. In addition, whenever the loading and unloading operation is performed, it is not required to adjust an optical position with reference to the X-ray optical elements.</p>
申请公布号 JPH1114565(A) 申请公布日期 1999.01.22
申请号 JP19970177744 申请日期 1997.06.18
申请人 RIGAKU CORP 发明人 MACHITANI YOSHIRO
分类号 G01N23/203;G02B21/00;(IPC1-7):G01N23/203 主分类号 G01N23/203
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