| 发明名称 |
CRYOGENIC RECTIFICATION SYSTEM FOR RECOVERY OF FLUORINE COMPOUNDS |
| 摘要 |
A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising three cryogenic rectification columns and a mass transfer contacting device.
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| 申请公布号 |
CA2243832(A1) |
申请公布日期 |
1999.02.20 |
| 申请号 |
CA19982243832 |
申请日期 |
1998.07.17 |
| 申请人 |
PRAXAIR TECHNOLOGY, INC. |
发明人 |
FISHER, THEODORE FRINGELIN |
| 分类号 |
C01B9/08;C07C17/38;C07C17/383;C07C19/08;F25J3/02;H01L21/304;(IPC1-7):F25J3/02 |
主分类号 |
C01B9/08 |
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