| 摘要 |
<p>PROBLEM TO BE SOLVED: To ensure that energy distribution of irradiation beams on a sample surface is substantially uniform and to reduce an energy loss in the irradiation beams from an electron gun. SOLUTION: A crossover of electron beams is formed by an electron gun 21 having a cathode face, a crossover image is formed at an aperture diaphragm (AS) disposed inside of electron beam irradiating means for introducing the electron beam to a sample 11, an image of the cathode face is formed at a visual field diaphragm disposed inside the electron beam irradiation means, the electron beams are irradiated to the sample 11, a generated electron including at least one of a secondary electron and a reflected electron generated based on the electron beams irradiated to the sample 11 is guided onto a detector 42 via an aperture diaphragm, and an image of the sample 11 formed on the detector 42 is detected.</p> |
