| 摘要 |
PROBLEM TO BE SOLVED: To obtain a film having excellent wear resistance and durability by specifying respective X-ray diffraction line intensity ratios, from (200) plane and (111) plane in parallel to the surface of a substrate, and lattice constants of titanium nitride, titanium-carbide, and titanium-carbonitride films formed by a vapor phase synthesis method, respectively. SOLUTION: The X-ray diffraction line intensity ratio I(200)/I(111) and the lattice constant are regulated to >=5 and 0.4231 to 0.4252 nm in the case of titanium nitride, >=4 and 0.4316 to 0.4338 nm in the case of titanium carbide, and >=4 and 0.997 0.424173x+0.432740(1-x)] to 1.003 0.44173x+0.42740(1-x)} nm when the ratio between carbon and nitrogen is (1-x):x in the case of titanium carbonitride, respectively. When a lamination coating film of two or more layers is formed, it is preferable that titanium nitride film, titanium carbide film, and titanium carbonitride film, each having 0.1-20μfilm thickness, are contained. For example, it is desirable to use a combination of titanium nitride, chromium nitride, and base material or a combination of titanium carbide, titanium carbonitride, titanium nitride, and base material.
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