| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chuck mechanism for many kinds of substrates which is capable of controlling an X-Y stage with high accuracy by suppressing vibrations through elimination of weight load to the chuck mechanism by reduc ing the number of actuators or moving sections. SOLUTION: A pair of a front arm 2a and a rear arm 2b are attached freely expandably and shrinkably to the robot arm 2 of the main body of a robot, and holding rods 3 are respectively hung from the arms 2a and 3b. A front plate 6a and a rear plate 6b divided from each other are arranged movably corresponding to the arms 2a and 2b, and the size of the opening formed of a substrate receiving section 6c between the front and the rear plates 6a and 6b is adjusted by forming holes 6d for movement, into which the holding rods 3 are inserted through the plates 6a and 6b.</p> |
