LITHOGRAPHIC INFORMATION CONTROL SYSTEM AND ALIGNER AND MANUFACTURE OF SEMICONDUCTOR DEVICE UTILIZING IT, LITHOGRAPHIC SYSTEM AND MANUFACTURE OF SEMICONDUCTOR DEVICE UTILIZING IT

摘要

PROBLEM TO BE SOLVED: To obtain a system finely and peculiarly controlling an aligner while permitting a user to construct a production control system by collecting information related on at least one of the plural aligners and enabling the information to be transmitted without through a host computer. SOLUTION: By a master data processor(MDP) 110, the information for informing a working state is collected from an MC 100 and controlled. Besides, the various kinds of information are transmitted to the MC 100. A centralized information server(CIS) 120 is provided with a function for editing and distributing the process program of a stepper and collecting the information and specially constituted so that history data required for revising and correcting the action parameter of the stepper is transmitted to the MDP 110 when data related on the performance of the stepper is collected and analyzed by the MDP 110. Thus, the need of labor and time required for resetting the parameter every stepper is eliminated.