| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple optical inspection equipment which can highly precisely inspect an object to be measured in a wide range, without using a light receiving apparatus having a large area for light receiving. SOLUTION: This equipment is provided with a projection lens 12 casting a light beam outputted from a light source 11 on a measurement surface, a light receiving apparatus 14 receiving the reflected light of the light beam cast on an object 3 to be measured, through a condenser lens 13, and a rotating polygon mirror 15 which changes the direction of reflection of the light beam outputted from the light source 11 and guided to the projection lens 12, deflection-scans the light beam over a specified angle width, and deflects the receiving direction of the reflected light converged through the condenser lens 13 and received by the light receiving apparatus 14, synchronously with the deflection scanning of the light beam. The detection position of the reflected light which the light receiving apparatus 14 detects is always made to coincide with the position irradiated with the light beam. |
