MALEIMIDE-BASED MONOMER AND ITS PRODUCTION, ALIPHATIC CYCLIC OLEFIN-BASED MONOMER AND ITS PRODUCTION, COPOLYMER RESIN AND ITS PRODUCTION, PHOTORESIST AND ITS PRODUCTION, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a new monomer facilitating its copolymerization with an aliphatic cyclic olefin, and capable of affording a resin having physical properties withstanding developers and resolving adhesion problem. SOLUTION: This new monomer is shown by the formula [R is a 1-10C (substituted) alkyl, 1-10C (substituted) primary to tertiary alcohol or 1-10C (substituted) diol], pref. 2-maleimido-ethyl acetate, 3-maleimido-propyl acetate or the like. It is recommended that this new monomer is obtained, specifically, by the following steps: (A) maleic anhydride is dissolved in tetrahydrofuran, (B) a reactive substance selected from ethanolamine, aminopropanol and the like is than added to the resulting solution to carry out a reaction, the resulting reaction product is dissolved in acetic anhydride followed by addition of sodium acetate and then carrying out an imidation reaction at 20-120 deg.C for 5-10 h or so, and the resulting reaction product is recrystallized with ethanol or the like.