| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device receiving and heating corrosive substances, which has light corrosion resistance to corrosive substances and is capable of rapidly heating the corrosive substances and shows good heat efficiency in heating the corrosive substance and also, to provide corrosion-resistant members appropriately used for the heating device, and a production method of the members. SOLUTION: This heating device has a vessel 1 for receiving corrosive substances, wherein the vessel 1 is provided with substrate 3 and 10 each of with consists of a ceramic material having a >=5,000Ω.cm resistivity at room temp. and silicon carbide films 4 and 11 each of which is a silicon carbide film for coating at least the surface to be exposed to the corrosive substances, of each of the substrates 3 and 100 and has a 20 to 500Ω.cm resistivity at room temp. and is formed by a chemical vapor growth method. |
