| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable wafer transferring operation to be accelerated so as to enhance a wafer treatment process in operation efficiency. SOLUTION: A wafer transferring device is equipped with a carrier table 2, where a carrier case that houses a prescribed number of wafers 6 is placed, a pusher 5 which is provided below the carrier table 2 and capable of pushing up a prescribed number of wafers 6 as high as prescribed from the carrier case 3, and a controller 10 which outputs drive signals to motors 11, 12, and 13 so as to enable the carrier table 2 to rotate about a vertical shaft by an angle of 180 deg. in a state in which the pusher 5 is made to be lifted up to push up to the prescribed height of a prescribed number of wafers 6 and then to make the pusher 5 descend.</p> |
