| 摘要 |
<p>PROBLEM TO BE SOLVED: To execute non-contact handling and transportation of a plate-like substrate, by arranging a tool in parallel to a supporting surface, connecting the tool to the supporting surface, and making gas flow to a dynamically balanced gas slit whose outer peripheral part forms an angle of a specified range through a gas distribution chamber. SOLUTION: A center hole 14 and the two circular cavities 16t and 16b of an upper face 18t and a lower face 18b are installed in the circular part 12 of a main body. In a circular cover 22, a center part 22m is engaged to the center hole 14 and a thin annular part 22r is installed on the outer side of the radius direction of the center part 22m. A gas distribution chamber 24 is formed between the lower face of the annular part 22r and the cavity 16t. A tool is arranged in parallel to a supporting surface, the tool is connected to the supporting surface, and gas is made to flow into a dynamically balanced gas slit 26 with an angleαwhich is 90 degrees - 180 degrees against an outer peripheral part, namely, a center part 20.</p> |
