| 摘要 |
A centrifugal processor for flat media, such as a silicon wafer, has a rotor (18) eccentrically positioned within a cylindrical chamber or bowl (14). Drainage openings (41) or slots are located near the bottom of the bowl (14). The rotor (18) is offset in a direction away from the drain openings (41). Fluids drain more quickly from the bowl (14), as the tendency of the spinning rotor (18) to draw fluids up and around the bowl (14) is reduced, due to the rotor offset and to the discrete drain openings (41), and the position and orientation of the drain openings (41).
|
