发明名称 MANUFACTURE OF ELECTRON EMITTING ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To improve a manufacturing yield significantly by correcting a defective conductive film to a good conductive film. SOLUTION: In this manufacturing method, a pair of element electrodes 2, 3 opposite to each other are formed on a substrate 1, a conductive droplet including a conductive substance is imparted between the element electrodes 2, 3, a conductive thin film 4 is formed by heating the conductive droplet, and an electron emitting part is formed by performing a forming process to a part of the conductive thin film 4. Then, the conductive thin film 4 and/or the electron emitting part are inspected, the conductive thin film 4 and/or the electron emitting part are removed based on the inspection result, and the conductive thin film 4 and/or the electron emitting part are formed again after the removal.</p>
申请公布号 JP2000011860(A) 申请公布日期 2000.01.14
申请号 JP19980182869 申请日期 1998.06.29
申请人 CANON INC 发明人 MIURA NAOKO
分类号 H01J9/50;H01J9/02;(IPC1-7):H01J9/02 主分类号 H01J9/50
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