摘要 |
<p>PROBLEM TO BE SOLVED: To improve a manufacturing yield significantly by correcting a defective conductive film to a good conductive film. SOLUTION: In this manufacturing method, a pair of element electrodes 2, 3 opposite to each other are formed on a substrate 1, a conductive droplet including a conductive substance is imparted between the element electrodes 2, 3, a conductive thin film 4 is formed by heating the conductive droplet, and an electron emitting part is formed by performing a forming process to a part of the conductive thin film 4. Then, the conductive thin film 4 and/or the electron emitting part are inspected, the conductive thin film 4 and/or the electron emitting part are removed based on the inspection result, and the conductive thin film 4 and/or the electron emitting part are formed again after the removal.</p> |