| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a jig for containing an article to be processed in which the number of particles to be generated can be suppressed by supporting the article to be processed at three points. SOLUTION: Three posts 76A-76C having a plurality of supporting grooves 82A-82C made at a specified pitch in order to support a plurality of article to be processed at the circumferential fringe thereof are secured, at the opposite ends thereof, by two end plates 78, 80 such that the articles to be processed can be supported horizontally at three points. In such a jig tar containing the articles to be processed, two supporting grooves 82A, 82B located on the side for carrying-in/carrying-out the articles out of three supporting grooves at same horizontal level of each post, are located symmetrically to an axis 84 extending in parallel with the direction for carrying-in/carrying-out the articles and passing through the center O of the article and the supporting groove 82C is located remotely from the axis. Since the article is supported at three points, the number of particles to be generated can be suppressed.</p> |
