| 摘要 |
<p>A machine for cleaning containers has inside and outside arrays (28, 29) of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor (70). Used cleaning solution is diverted to a reclaim tank (42) for reuse, thereby allowing low-cost cleaning with concentrated chemicals, and with the creation of less liquid waste requiring disposal. In a method for removing contaminants from flat media or silicon wafer containers or carriers, a mixture of surfactant and de-ionized water is sprayed onto containers on a spinning rotor (70). The used cleaning solution is collected, filtered and reused.</p> |
