| 摘要 |
PROBLEM TO BE SOLVED: To attain stable conveyance of an object to be conveyed in a floating condition and prevent generation of dust and degradation of cleanness in a clean room. SOLUTION: Conveyers 41, 42 are provided with permeable ceramic materials 12, air supply pipes 13 jetting air through the permeable ceramic materials, retaining mechanisms retaining a glass substrate 11 floated by jetting air at a fixed position, drive parts 32 and belts 33. A conveying apparatus is provided with a rotation drive part 22 which moves the air supply pipes 13 while rotating in addition to the permeable ceramic materials 12 and the air supply pipes 13. |
