发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MAKING THE SAME
摘要 PURPOSE: A method for forming an element separation area of IC is provided to reduce a wiring parasitic capacitance, thereby enhancing an element characteristic. CONSTITUTION: A semiconductor device includes a semiconductor substrate(1) having a first conductive area, a trench element separation area formed on the substrate; an active area(13,14,23,24) for forming a semiconductor device determined by the trench element separation area; and a similar active area(a-j) having a second conductive impurity diffusion layer on the active area. Thereby, a wiring parasitic capacitance is reduced, and a wiring delay speed is improved, a circuit speed of a high speed is made, and a low power consumption is made.
申请公布号 KR20000017223(A) 申请公布日期 2000.03.25
申请号 KR19990032730 申请日期 1999.08.10
申请人 SHARP CORPORATION 发明人 KAWAMURA AKIO;KONISHI AKITO
分类号 H01L21/76;H01L21/304;H01L21/336;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L21/76 主分类号 H01L21/76
代理机构 代理人
主权项
地址