SILICON INTERCONNECTION PASSIVATION OPTIMIZED FOR MAXIMIZING REFLECTIVITY AND METALIZATION PROCESS

摘要

PURPOSE: A method of passivation and metallization in a liquid crystal display is provided to increase a reflectivity of a pixel electrode. CONSTITUTION: The method for forming a metal surface with optimized reflectivity comprises the steps of: chemical-mechanical polishing of a dielectric layer formed on a metal after planarization of a silicon on glass; chemical-mechanical polishing of a dielectric layer formed on a metal after forming a bias; forming a metal glue layer composed of parallel titanium on the dielectric layer; depositing a metal on the glue layer at a low temperature; forming a least first layer in reflectivity strengthening coatings on the deposited metal; and forming a first reflectivity strengthening coating at a temperature which is very similar to the temperature for forming metal electrode layer.