| 发明名称 |
PUMP PROTECTION SYSTEM, PUMP PROTECTION METHOD, AND PUMP SYSTEM |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a system and method to protect a pump from an overload while maintaining a vacuum state. SOLUTION: A pump protection system 10 is provided with an electric power detector 18 which detects a power consumed by a motor 16 to drive a vacuum pump 14 as a load that is applied thereto, and control means 20 which decreases a rotation speed of the motor 16 when a value of the consumption power detected by the electric power detector 18 reaches or exceeds a predetermined value.</p> |
| 申请公布号 |
JP2000110735(A) |
申请公布日期 |
2000.04.18 |
| 申请号 |
JP19980279511 |
申请日期 |
1998.10.01 |
| 申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
SASAKI TATSUYA;YUZUHARA NAOKI;IMAI AKIHIKO |
| 分类号 |
F04D19/04;F04B49/10;F04B49/20;(IPC1-7):F04B49/10 |
主分类号 |
F04D19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
