| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a welded joint for high purity gas, excellent in corrosion resistance and used for semiconductor manufacturing equipment or the like. SOLUTION: The Fe-base alloy for high purity gas has a composition containing, by weight, <=0.03% C, <=0.1% Si, <=0.1% Mn, 20-35% Cr, 0.1-5% Mo, 0-1% Nb, 0-1% Ti, 0-0.5% Cu, 0-0.5% W, and 0-5% Ni, also containing, as impurity elements, <=0.005% S, <=0.02% P, <=0.03% N, <=0.01% O, and <=0.005% Insol.Al, and satisfying relations [Sol.Al%]<=0.0002×[Cr%]+0.006 and [Sol.Al]<=0.02×([Si%]+[Mn%])+0.006.
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