| 摘要 |
PROBLEM TO BE SOLVED: To moreover improve the excellent wear resistance and low friction efficient of a sliding member by forming a film of nitride consisting essentially of titanium nitride and contg. at least one of B and Si, forming the structure of the nitride of the face-centered cubic one and specifying the size of the crystal grains. SOLUTION: At least one element selected from B and Si, and Ti are simultaneously vacuum-deposited, and, moreover, ion beams consisting essentially of nitrogen are applied to produce a hard film for a sliding member composed of nitride. The structure of the crystals of the nitride is formed of the face- centered cubic one, the size of the crystals is controlled to <=9 nm, and the Vickers hardness thereof is controlled to 3000. The chemical compsn. of the nitride is expressed by Ti(100-x)Mex, wherein (x) denotes the atomic concn. and is expressed by 2%<=x<=30%. As the base material, stainless steel or an Ni base alloy having about <=11×10-6 thermal expansion coefficient is desirably used. The accelerating voltage of the ion beams is controlled to <=40 KV.
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