| 摘要 |
PROBLEM TO BE SOLVED: To light all over the whole of a large size substrate with simple and inexpensive constitution, make foreign matter detecting ability on the substrate excellent, and efficiently carry out visual inspection for the substrate. SOLUTION: This projector is a projector used for a visual inspection device for irradiating a surface of a large sized substrate 22 to conduct inspection for a defect or the like, and is provided with a light source 28 for irradiating the surface of the substrate 22, a scattering means 24 arranged in an illuminant light path of the light source 28 to be switched between a transparent condition and an opaque condition by voltage control, and a means 26 for controlling an impressed voltage of the means 24 to be switched between the transparent condition and the opaque condition. |
