| 摘要 |
<p>A wafer transfer device wherein multiple kinds of cassettes (41 (42)) having different sizes and containing wafers in the stack direction can be selectively attached to an elevator mechanism (1a), a second sensor (11) comprising a transmission sensor which has a light-emitting element (11a) and a light-receiving element (11b) is disposed outside the area occupied when a cassette (42) of maximum size is attached to the elevator mechanism (1a), a selected cassette is detected, and the size of the wafer is measured based on the detection output from the second sensor (11).</p> |
