NECESSARY POWER MONITOR SYSTEM FOR EVERY DEVICE

摘要

PROBLEM TO BE SOLVED: To build an environment friendly factory by monitoring the energy consumed in the auxiliary machines, heating of manufacturing devices, cooling heat of cooling water and the steam consumption respectively for every manufacturing device. SOLUTION: A consumed energy monitor device of a necessary power monitor system S monitors the energy consumption of electric power and fuel such as kerosene which is used by an external regulator 80, a manufacturing device 100 such as a semiconductor manufacturing device and its relative auxiliary machines. A heating monitor means monitors the heating of the devices 100 in a maintenance area 11. A heat energy monitor means monitors the cooling heat of a refrigerator 105 which supplies the refrigerants to the regulator 80, a dry coil 103 and a manufacturing cooling device 104 respectively. Under such conditions, a manufacturing device for a small equipment load and a clean room of less excessive specifications are constructed by monitoring the energy waste of every device 100 as the heating and managing the earnings/expenses of energy of every device 100.