| 摘要 |
PROBLEM TO BE SOLVED: To improve a voltage measurement precision by a four-terminal method by constituting by coating at least the vicinity of a leading end except the leading end with an insulating film. SOLUTION: A hard metal round rod is cut into a predetermined length and one end is cut into a circular cone. A leading end is polished and formed into a hemisphere of a radius of approximately 15μm to prevent damage to a body to be measured. The vicinity of a leading end 13a including the leading end is insulation coated with an insulating material such as diamond-like carbon, alumina or the like in a thickness of approximately 1μm. An insulating film 15 is thus coated. Thereafter, a probe pin 13 is polished with a whetstone in a state of a contact posture to the body to be measured at the time of inspection, whereby the insulating film 15 coated to the leading end 13a is detached. At this time, the leading end itself of the probe pin 13 is formed of the hard metal and therefore not polished, and only the insulating film 15 coating the leading end 13a is detached. The probe pin 13 is manufactured in this manner.
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