| 摘要 |
PROBLEM TO BE SOLVED: To accurately and efficiently detect only a surface defect such as small irregularities and projections without erroneous detection even if there are contamination, stain, and dust on a surface to be inspected of a body. SOLUTION: An inspection region judgment means 10 judges an inspection region based on the density projection operation of the brightness of a light reception image that is formed by an image pick-up means 2 arranged so that irregular reflection light being applied at a specific incidence angle ofαfrom a lighting means 1 and reflected at a specific reflection angle ofβsmaller thanαfrom a surface to be inspected, a defect candidate extraction means 11 extracts only those within an inspection region out of isolation points being detected from a light reception image due to the image pick-up means 2 as a defect candidate, only those where the total number of defect candidates is smaller than a specific value are regarded to be appropriate, and a true surface defect is identified from erroneous detection information due to the adhesion irregularity of oil based on comparison count information where the amount of moving and moving direction of the defect candidate of time series match within specific conditions, information regarding the presence or absence of close matching, and the area information of the defect candidate.
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