SURFACE PLANARIZATION SYSTEM AND METHOD

摘要

A surface planarization system is presented. The system comprises an external energy source for generating a localized energy distribution within a processing region, and a control unit for operating the external energy source to create, by the localized energy distribution, a predetermined temperature pattern within the processing region such that different locations of the processing region are subjected to different temperatures. This provides that when a sample (e.g. semiconductor wafer) during its interaction with an etching material composition is located in the processing region, the temperature pattern at different locations of the sample's surface creates different material removal rates by the etching material composition (different etch rates).

主权项

1. A surface planarization system comprising: an external energy source for generating a localized energy distribution within a processing region, and a control unit for operating said external energy source to create, by said localized energy distribution, a predetermined temperature pattern within said processing region such that different locations of said processing region are subjected to different temperatures, providing that when a sample interacting with an etching material composition is located in said processing region, the temperature pattern at different locations of the sample's surface creates different material removal rates by said etching material composition.