| 摘要 |
PROBLEM TO BE SOLVED: To enable efficient, uniform surface treatment at a high efficiency of giving a polar functional group a substrate and improve the adhesivity of the substrate, even when the substrate is conveyed at a high speed. SOLUTION: In a surface treatment method of a lengthy substrate 1, a treatment part 2 for plasma-treating the substrate 1 continuously conveyed continuously under the atmospheric pressure or a pressure close to the atmospheric pressure is provided. The treatment part 2 is a treatment chamber having the inlet and outlet of the substrate 1. In the surface treatment of the substrate 1 by plasma generated by forming a pulsing electric field in the substrate 1 in the treatment chamber, the percentage of reaction gas in treatment gas to be seal in the treatment chamber is at least 30%, and the pressure of the treatment chamber is set up to be higher than the atmospheric pressure.
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