发明名称 CUTTER
摘要 PROBLEM TO BE SOLVED: To detect the state of cut grooves sequentially without interrupting the cutting operation by disposing means for detecting a cut groove made in a work at a position adjacent to a cutting means. SOLUTION: Means 20 for detecting the state of cut grooves is disposed at a position adjacent to a cutting means 10. When a groove is cut, the detecting means 20 picks up the state of a cut groove in the form of an instantaneous image through an image pickup means 22 utilizing an optical means 21 or an illumination means 36. The image is stored in a first memory means 31 constituting a processing means 23. A decision means 33 compares the image stored in the first memory means 31 with an image prestored in a second memory means 32. If the difference between both images exceeds an allowable range as a result of comparison, abnormality is informed by an informing means 34. According to the arrangement, the state of cut grooves can be recognized without interrupting the cutting operation.
申请公布号 JP2000252240(A) 申请公布日期 2000.09.14
申请号 JP19990055358 申请日期 1999.03.03
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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