MANUFACTURE OF HEAT EQUALIZATION PLATE AND IMAGE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To unify temperature distribution of a substrate by enhancing heat equalization property of the substrate constituting an image display device. SOLUTION: A heat equalization plate mounted in a vacuum chamber 5 to adjust a temperature of a tabular substrate 4 carried into the vacuum chamber 5 to a specified temperature has a metal plate 1, a heat source heating the plate 1, and plural springs 3 mounted on the plate 1. The tabular substrate 4 is placed on the plural springs 3. The plural springs 3 allow to increase the number of thermal contact points between the plate 1 and the tabular substrate 4 to enhance heat equalization property of the tabular substrate 4.