发明名称 METHOD OF MANUFACTURING LEAD FRAME FOR SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To reduce warpage and undulation of a lead frame by using a thermoplastic adhesive as an adhesive used for forming a multilayer structure. SOLUTION: The side of a heat spreader 3 of the completed product of a lead frame 10 with a heat sink is set onto a heating plate 8 for reducing warpage and is heated, so that the entire lead frame 1 becomes flat at a temperature at which a thermoplastic adhesive becomes soft. Then, when the lead frame 1 becomes flat by heating, heating is stopped, the lead frame 1 is moved onto a cooling plate 9 for reducing warpage from the heating plate 8 for reducing the warpage, thus cooling the side of the heat spreader 3. A heat treatment is conducted so that the amount of thermal expansion of each member becomes equal at junction temperature where the adhesive becomes hard.</p>
申请公布号 JP2000260922(A) 申请公布日期 2000.09.22
申请号 JP20000105396 申请日期 2000.04.03
申请人 HITACHI CABLE LTD 发明人 KAMEYAMA YASUHARU;OTAKA TATSUYA;SUZUMURA TAKASHI;SATO TAKUMI;HAGITANI SHIGEO;TAKAHAGI SHIGEJI
分类号 H01L23/50;(IPC1-7):H01L23/50 主分类号 H01L23/50
代理机构 代理人
主权项
地址